In this paper,the composition,mechanism,research status and application prospect of micro flow control system are briefly introduced. The closed-loop control of micro fluid is an important trend in the development of high accuracy reagent distribution. In view of the inherent advantages and defects in the field of piezoelectric pump,a series of problems,such as high precision closed-loop control system, which has the characteristics of self testing and control, needs to be settled.%对微流量控制系统的组成、机理、国内外在该领域的研究状况以及系统的应用前景进行了简要介绍.而实现微流体的闭环控制是实现高精度试剂分配的重要发展趋势,鉴于压电泵在该领域的固有优势及缺陷,将微流量传感器与压电泵集成,进行流体的驱动、检测和控制一体化的设计,研制具有自检测与控制功能的高精度闭环控制微系统等方面均存在着一系列问题,需要继续研究.
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