基于MCM-41的高灵敏度和高稳定性的QCM湿度传感器研制

摘要

利用介孔材料MCM-41作为石英晶体微天平(Quartz Crystal Micro-Balance, QCM)质量型传感器的湿敏材料来构建湿度传感器。采用X-ray、SEM、BET等对样品的结构和形貌进行了表征和分析,并系统研究了其湿敏性能。结果表明,该湿度传感器具有湿度量程大(1%∼100%RH )、灵敏度高、稳定性好、湿滞小、易于集成化等优点。%Mesoporous silica MCM-41 was prepared and deposited on the quartz crystal micro-balance (QCM) to get the highly stable and sensitive humidity sensors. X-ray diffraction, nitrogen adsorption/desorption, transmission electron microscopy were employed to characterize the sensing materials. The results showed that the sensors coated with mesoporous silica MCM-41 had good humidity (1%∼100%RH), high stability, quick response/recovery time, high reproducibility and lag narrow hysteresis.