一种可吸收垂直入射光的管状量子阱红外探测器

摘要

A three-dimensional tubular quantum well infrared photodetector (QWIP) was demonstrated via rolled-up technology,which is on the basis of conventional lithography and wet chemical etching.When the tubular QWIPs and the corresponding planar devices were illuminated by the vertically-incident light,their dark current,blackbody response,and photocurrent responsivity spectra were characterized.Under the operating temperature of 60 K and the bias of 0.45 V,a peak responsivity of 20.6mA/W and a peak quantum efficiency of 2.3 ％ at the peak response wavelength of 3.62 μm were obtained in the tubular devices.By clarifying the principle of optical absorption,the tubular QWIP presents a novel optical coupling manner.The photocurrent responsivity spectra of the device for the exter-nal light were further studied at different incident angles.It is shown that with the approximately circular symmetry of the microtubes,the tubular devices have a wide perspective,which is advantageous to the design of infrared detection system.%基于传统的光刻和化学湿法腐蚀工艺,通过卷曲技术,提出一种三维管状量子阱红外探测器.该管状器件相比于未卷曲的平面器件,在垂直入射光照下,展现了优良的暗电流、黑体响应和光电流响应率特性曲线.当工作温度60 K、偏置电压0.45 V时,管状器件峰值响应率为20.6 mA/W,峰值波长3.62 μm,最大量子效率2.3％.从几何光学的角度分析了管状器件的垂直光吸收原理,进而揭示了一种特殊的光耦合方式.测试了不同角度入射光照射下的光电流响应率谱.由于微管的近似圆形对称性,器件具有很宽的视角,有助于红外探测系统的设计.