石墨烯薄膜的前驱气体预热化学气相沉积快速制备方法

摘要

Graphene has been considered as promising material for next generation transparent electrodes due to its excellent optical ,electrical ,and mechanical properties ,but unfortunately the practical use of graphene in end‐product devices has not been demonstrated since the yield ,size and uniformity problems are yet to be solved to satisfy industrial standards .Here we show large‐area monolayer graphene films by precursor‐gas preheating thermal chemical vapor deposition (PT‐CVD) ,w hich enabled mass‐produced and larger production of graphene film over 300 mm × 300 mm PET substrate area with an optical transmittance of over 95% and a sheet resist‐ance of (146 ± 15) Ω/sq .The uniformity ,transmittance and sheet resistance properties of graphene had been characterized by using scanning electron microscope (SEM ) ,Raman spectroscopy ,UV‐Vis spectrophotometer and four point probe resistivity tester .Finally ,we successfully patterned graphene microano‐structure and solved vacuum lamination problems for graphene‐based truly multi‐touch capacitive touch panels in mobile phones .%石墨烯具有优异的光学、电学和力学等性能而备受人们关注，但是目前石墨烯材料受产量、尺寸和均匀性等因素的限制，以至于在终端产品上还没有形成真正的应用。主要阐述了一种利用前驱气体预热化学气相沉积法（PT‐CVD）快速制备大面积单层石墨烯薄膜方法，实现石墨烯薄膜批量制备和大面积转移在300 m m ×300 m m 面积的聚对苯二甲酸乙二醇酯衬底上，并获得在400～800 n m光波段下大于95％的光透过率和（146±15）Ω／sq的方块电阻。分别利用扫描电镜、共聚焦拉曼光谱仪、紫外‐可见分光光度计和四探针设备等检测了前驱气体预热化学气相沉积法制备的石墨烯薄膜的均匀性、透过率和方块电阻等参数特性。最后，通过解决了石墨烯微纳米线路结构和真空贴合等关键技术实现了石墨烯真实多点电容式触控面板，并成功运用在55．寸手机终端产品应用上。