A Bench top Quadrupole Mass Spectrometer System for Accurate Analysis of Trace Noble Gas was introduced in this paper. The inlet system was a especially designed one. And a capacitance pressure gauge with its linearity less than 0.01% was used to measure the fixed volume sample ratio. By using the calibration gas with the uncertainty of which less than 0.1% ,isotope condensed diluent could be quantified online. The procedure is done by alternate online mixture gas measurement of diluent gas, calibration gas to quantify the diluent gas, and diluent gas, sample gas to quantify the sample gas. The precision of six inlet from the same sample is +_0.13%0; The precision of six getting sample from the same source is less than ±0.5%. Self test was done by testing the mixture gas got with weighing method, in which consists Kr and Xe of 30 mg/kg. The system uncertainty tested to be below ±1%.
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