一种平面超薄型电磁感应式角位移传感器

摘要

In order to overcome the disadvantages of the traditional inductive time grating sensor,such as low manufacturing efficiency,poor consistency of manual windings and high weight,this paper carried out the study of a planar ultra-thin electromag-netic induction angular displacement sensor which was developed based on the principle of time grating sensor.The ultra-thin structure of the sensor was realized by use of PCB technology.The feasibility of the sensor structure was verified by simulation and actual experiments.Results of actual experiments show that the original measurement error of the sensor in the range of 0° ~360° is within ± 80″.The reseach of this sensor will be very helpful to the development of low-cost ultra-thin time grating angular dis-placement sensors.%为了解决传统的铁基材料磁场式时栅齿槽加工效率低、手工绕线一致性差和传感器厚重的问题,文中结合时栅传感器的测量原理,开展了一种平面超薄型电磁感应式角位移传感器的研究.该传感器通过采用PCB工艺技术进行了超薄型结构设计.通过开展仿真实验和精度实验,验证了传感器结构方案的可行性.精度实验获取了0°~360°内传感器的原始误差,结果表明其原始测量误差在±80″以内.该传感器的实现将有利于低成本的超薄型时栅角位移传感器的研发.