掺锶对钛酸铅薄膜结晶性能的影响

摘要

钛酸锶铅(PST)薄膜是一类重要的铁电薄膜材料.采用溶胶-凝胶法在硅(100)衬底上制备了钛酸锶铅薄膜.利用X射线衍射(XRD)、原子力显微镜(AFM)等表征手段,表征了不同锶掺杂量及不同退火温度对薄膜结晶性能的影响.通过实验发现:锶掺杂对薄膜的微观结构和表面形貌有重要的影响.由XRD谱图发现,随着锶掺入量的增加,Pb 1-xSrxTiO3薄膜中的晶轴比、晶胞体积都逐渐减小,晶化温度降低.通过AFM发现,相同掺锶量的薄膜随着退火温度的升高,结晶性能增强,颗粒增大,粗糙度增加.%Plumbum strontium titanate (PST) thin film is a kind of important ferroelectric thin film.Strontium - doped plumbum titanate was grown on Si(100) substrate by sol-gel method.Effect of different strontium - doped contents and annealing temperatures on crystallization properties of the films were investigated by XRD and AFM etc..Results showed that strontium - doped content had great effect on microstructure and morphology of the films.The c/a,unit cell volume,and crystallization temperature were all decreased with the increasing of strontium - doped content from XRD spectrogram.In addition,AFM analysis showed that as the increasing of annealing temperature,crystallization properties were promoted,and particle size and roughness of the films were increased.