石墨平台微结构的纳米级红外光谱表征

摘要

具有原子级光滑平面的石墨平台微结构是实现特殊功能微机电器件、微系统的重要基础.石墨微结构的化学信息表征对微机电器件、微系统的制备及性能有着重要的意义.先使用原子力显微镜获得形貌信息,再使用纳米级红外光谱对微结构的不同区域进行表征,获得了多个特征位置的红外光谱.通过对红外光谱的分析发现相对于其他位置,石墨平台表面具有非常有序的碳六元环结构,并且吸附的水分子最少.而石墨平台微结构的边缘由于悬键及微加工等原因是吸附水分子最多的位置,石墨基底由于微加工的破坏已经不具有碳六元环结构.这些信息为了解微结构的化学状态提供了帮助,明确所处环境对石墨平台微结构不同位置的影响,能够指导微机电器件的制备与应用.%The graphite mesa microstructure with the atomically flat surface is an important basis for the realization of the special function of MEMS devices and micro systems. Chemical information characterization of graphite microstructure has important significance on the manufacture and properties of MEMS devices and micro systems. Atomic force microscopy was used to obtain the morphology information, and then the different regions of the microstructure were characterized by the nanoscale infrared spectroscopy. Through the analysis of the infrared spectra, it is found that the surface of the graphite mesa has a very ordered carbon hexatomic ring structure with respect to the other places, and adsorbs least water molecules. The edge of the graphite mesa microstructure adsorbed most water molecules because of the dangling bond and microfabrication. The graphite substrate has no carbon hexatomic structure due to the destruction of the microfabrication. This information helps to understand the chemical state of the microstructure. Above information can make it clear that the influence of the environment on the different regions of graphite mesa microstructure and can also guide the manufacture and application of MEMS devices.