the Key Laboratory of RF Circuits and System of Ministry of Education;
Hangzhou Dianzi University;
Hangzhou 310018;
P. R. China;
State Key Laboratory of Transducer Technology;
Chinese Academy of Sciences;
Shanghai 200050;
P. R. China;
Toshiba Hydro-Electro Equipments Company;
Hangzhou 311504;
P. R. China;
MEMS器件; 电容式; 电网; 地带; 非线性变化; 表演; 电场; 边缘效应;