新型大气压微波等离子体炬的仿真研究

摘要

设计了一种新型的大气压微波等离子体炬结构.入射主频为2 450 MHz,基于HFSS软件对其进行了仿真研究.在仿真过程中,对该结构的各个参数进行了优化,并得出对场强分布的影响规律.结果表明,探针的使用对腔内场分布有很大影响.根据优化参数对微波等离子体炬进行了仿真模拟,在等离子体发生腔产生了高幅值的电场强度,品质因数达到2×10 4,可以在大气压下激发等离子体.%An atmospheric pressure microwave plasma torch(MPT) operating at 2. 45 GHz was designed. Corresponding simulation based on HFSS code was performed and the influences of structure parameters on the E-field distribution in the device were analyzed. The results indicate that the use of coupling probe will have a distinct impact on the field distribution in the device. A MPT with strong electric field amplitude and high Q-factor about 20 000 was achieved in simulation by adjusting the structure parameters, which could produce microwave plasma at atmospheric pressure.