针对高功率激光装置内部最易产生受激布里渊散射(SBS)效应的大口径取样光栅(BSG)元件,测试了经过化学刻蚀、紫外激光清洗作用处理后,大口径光学元件BSG侧面在355 nm激光辐照下的损伤阈值、损伤形态以及产生的石英颗粒气溶胶对环境污染程度的分析.结果表明:经过化学刻蚀,BSG侧面的损伤阈值提高78％,基本与通光面的损伤阈值相当,而经过紫外激光处理后的损伤阈值提升不高,仅为通光面损伤阈值的56％.侧面对比分析了相同激光能量辐照下样片侧面产生的气溶胶污染状况,结果表明紫外激光处理同样可以提高光学元件侧面产生污染物的阈值,且对光学元件性能没有影响.通过微观形貌和对通光口径影响分析表明,紫外激光清洗处理比化学刻蚀具有更好的安全性和适用性.%Boron carbide films were deposited on Si and Ge substrates using KrF eximer laser. Influences of laser energy, distance between the target and substrate, and bias voltage were studied. A Fourier transform infrared spectroscope and a nano-indenter were used to test the optical transmission and hardness of the samples. Furthermore, the adhesion performance of the film and substrate was tested according to the common criterion of optical films. The largest transmission of Si and Ge advanced 10% after only one surface of substrates was coated by boron carbide films. The nano-hardness of the coated substrates reached more than 3 times that of the uncoated substrates and the adhesion was also satisfactory. The results show that boron carbide films are useful as anti-reflective and protective films for optical substrates.
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