光学薄膜抗激光损伤研究发展

摘要

随着大能量／高功率激光器的发展需求日益突出，光学薄膜的激光损伤阈值逐步成为激光器发展的瓶颈，受到国内外高能激光器研究领域的广泛关注。阐述了光学薄膜激光的损伤机理、激光损伤阈值测试平台及方法，结合自身研究成果，综述性分析了国内外光学薄膜抗激光损伤技术与手段研究的发展情况，主要包括离子束预处理、离子束与退火后处理、虚设保护层等；重点提出了磁过滤结合激光沉积的复合沉积技术，并建议加速推动无缺陷沉积的原子层沉积技术，为大幅提高光学薄膜抗激光损伤能力、满足当前需求提供了理论基础。%Along with the development of high energy or high power lasers,especially laser weapon and lasers for controlled nuclear fusion,the laser induced damage threshold of the optical films gradually becomes the bottleneck against the development of the lasers,which is of considerable interest from the world.Laser induced damage mechanism of optical films,test flat and method for laser induced damage threshold were expatiated.The development of researches on the technologies and methods for laser damage resistance of optical films at home and abroad,which included ion beam pretreatment,ion beam or anneal treat-ment,pretest coating with the materials of high refractive index and so on,were analyzed.The pulsed laser deposition with mag-netic filter technology was emphasized in the expectation,and the atom layer deposition was advised to accelerate to develop, which supplied the theoretic base to improve the laser damage resistance of optical films to settle for current requirements.