Low-Temperature Catalyst-Free Growth of Two-Dimensional Crystals on Dielectrics for Nanodevices

摘要

One of the largest problems,which result inlittle success of applying graphene in electronics in-dustry,is the lack of a low-cost,reliable,andcontrollable method to produce ultra-cleanhigh-quality graphene directly on dielectrics at lowtemperature,which can directly be used in electri-cal devices.Plasma-enhanced chemical vapor de-postion(PECVD)realizes catalyst-free growth