Centre of Micro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Dublin 4 Ireland;
Centre of Micro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Dublin 4 IrelandState Key Laboratory of Precision Measuring Technology and Instruments Centre of Micro/Nano Manufacturing Technology(MNMT) Tianjin University Tianjin 300072 China;
ACSM; single atomic layer removal mecha-nism; crystallographic orientation effect; mechanical cutting; Manufacturing III;