刻蚀设备在太阳能晶硅电池刻蚀工艺中的应用

摘要

T he passage introduces the application of the laser etching device to the solar silicon cells. C ontrast to the traditional plasm a etching device, the passage analysis deeply the structure of m achine,the principle of technology,and the result of the silicon cells testing. T he laser etching device applied to the silicon cells have the advantages in theory that the silicon cells can avoid to w aste the efficiency and enhance the w hole transitional efficiency of the solar silicon cell. A t the sam e tim e, w ith lots of experiences w e m ake sure the laser device have the excellent etching perform ance and contribute to enhance the efficiency of the cells.%介绍了激光划线设备在太阳能电池中的应用。与传统等离子体刻蚀设备对比，从设备结构，工艺原理，试验测试等方面做了深入的分析，并从理论角度分析得出激光刻蚀具备效率损失小，能够提高电池片的转换效率的优点，同时用实验验证了激光划片设备具有优异的刻蚀效果，对提升电池片效率的贡献。