State Key Laboratory of Chemical Engineering College of Chemical and Biological Engineering Zhejiang University Hangzhou 310027 ChinaInstitute of Zhejiang University–Quzhou Quzhou 324000 China;
Department of Chemical Engineering Massachusetts Institute of Technology Cambridge MA 02139 USA;
Membrane separation; Chemical vapor deposition; Atomic layer deposition; Molecular layer deposition; Thin films; Metal-organic frameworks; Polymers; Advanced manufacturing;