SECS/GEM标准模型分析及应用

摘要

SECS/GEM是半导体自动化生产中广泛采用的一个行业标准。首先介绍了SECS/GEM标准的整体框架,并分析了其行业发展状况,然后依次说明了SECSⅠ/Ⅱ、GEM、HSMS各个分层标准的数据报文格式、传输控制模型、状态转换模型以及相互间的通信控制方式等,最后分析了该标准在我国半导体自动化生产中的应用状况。实践表明,SECS/GEM标准设计严谨,适应面广,在我国半导体工业中应用前景广阔。%The SECS/GEM is an industry standard which is widely used in the automation of semiconductor.In this paper,the overall standard frame of SECS/GEM is introduced,and its industry development is analyzed.After that,SECSⅠ/Ⅱ,GEM and HSMS＇s stratification standard＇s data message format,transmission control model,the state transition model and mutual communication control mode are illustrated.Finally,the standard＇s application in our semiconductor＇s automatic production is analyzed.The practice shows that the SECS/GEM standard with a perfect design has a wide application prospect in homeland＇s semiconductor industy.