化学机械抛光超薄 SUS304不锈钢抛光液研究

摘要

Flexible display has become a research hot spot as next generation display technology and stainless steel is one of the main materials of flexible large size display substrate To realize a super-smooth no-damage surface on stainless steel chemical mechanical polishing CMP is adopted The influence of abrasive size and contents of dispersion agent oxidant agent abrasive and corrosion inhibitor agent on the material removal rate and the surface roughness of CMP 304 stainless steel had been studied by orthogonal tests The results show that abrasive size has the most significant effect on the surface roughness followed by contents of H2O2 glycerol oxalic acid abrasive in turn The abrasive size has the maximum effect on the material removal rate followed by contents of abrasive glycerol oxalic acid and H2O2.%柔性显示已成为下一代显示技术的研究热点，不锈钢材料是柔性大尺寸显示器衬底的主要材料之一。为优化不锈钢表面的超光滑无损伤加工，采用化学机械抛光(CMP)技术，通过正交试验，研究磨料粒度尺寸、分散剂、氧化剂、磨料质量、缓蚀剂用量等因素对抛光后材料去除率和表面粗糙度的影响。试验结果表明：磨料粒度尺寸对表面粗糙度的影响最大，其次为双氧水、丙三醇、草酸、磨料质量；影响材料去除率的因素排列是磨料粒度尺寸、磨料含量、丙三醇含量、草酸含量、双氧水含量。