磷酸二氢钾晶体的立轴端面可磨性研究

摘要

磷酸二氢钾(potassium dihydrogen phosphate,KDP)晶体是公认的性能优良的光学晶体,尤其是大口径(≥400 mm)的KDP晶体,是激光核聚变中不可缺少的光学元件之一.KDP晶体从生长到制造成为光学元件,需要经过切割、精密加工、超精密加工及镀膜等多道工序,加工周期长.本研究通过立轴端面磨床对KDP晶体进行磨削加工试验,对比不同粒度的树脂结合剂金刚石砂轮(D7、D36、D91、D151),在不同的加工参数下(主轴转速、工件进给速度、磨削切深),对表面粗糙度R a、表面微观形貌的影响,研究KDP晶体磨削的可行性,为实现以磨代车(抛),缩短KDP光学晶体元件制造周期奠定基础.%Potassium dihydrogen phosphate ( KH2 PO4 or KDP) , an recognized optical crystal , has been widely used in laser nuclear fusion projects due to its good quality of large electro-optic coefficient and large diameter( ≥400 mm) . From growth to processing into optical element , it requires procedures of cutting , precision machining , ultra-precision machining , coating and so on , and the processing period is long . In this paper , the grinding process of the KDP crystal is carried out using the vertical spindle face grinding machine . The influences of different particle sizes resin bonded diamond wheels ( D 7 , D36 , D91 , D151 ) on the surface roughness and surface micro-topography under different processing parameters ( spindle speed , feed speed , grinding depth) are compared . The feasibility of KDP crystal grinding is studied which lays the foundation for realization of grinding instead of turning ( polishing) and shortening the manufacturing cycle of KDP optical elements .