Centre Européen de la Céramique;
Limoges;
France;
Ecole des Mines;
Parc de Saurupt;
Nancy;
France;
Université de Limoges;
Limoges;
France;
Thermochemical; Process; Expanding; Plasma; Thin; Films; Molybdenum; Nitrides; Molybdenum; Oxides; NHx; Species;