TeO_(x) Thin Films for Write-Once Optical Recording Media

摘要

TeOx thin films were prepared by vacuum evaporation of TeO2 powder. Structural characteristic and surface mor phology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a twocomponent system comprising Te particles dispersed in an amorphous TeO2 matrix. The dispersed Te particles were in a crystalline state. The TeOx films showed a finely granular structure and a rough surface. Results of the static recording test showed that the TeOx films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeOx films were suitable for using as a blue-green wavelength high density optical storage medium.