Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of ChinaCenter for Precision Engineering Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of China;
Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of ChinaCenter for Precision Engineering Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of China;
Research Center of Laser Fusion China Academy of Engineering Physics Mianyang Sichuan 621900 People’s Republic of China;
Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of ChinaCenter for Precision Engineering Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of China;
Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of ChinaCenter for Precision Engineering Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of China;
Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of ChinaCenter for Precision Engineering Harbin Institute of Technology Harbin Heilongjiang 150001 People’s Republic of China;
force modulation; controllable indentations; entire micro-ball surface; microsphere center alignment;