Yokohama National University Hodogaya Yokohama Japan;
Yokohama National University Hodogaya Yokohama Japan;
Yokohama National University Hodogaya Yokohama Japan;
NuFlare Technology Inc. Yokohama Japan;
NuFlare Technology Inc. Yokohama Japan;
NuFlare Technology Inc. Yokohama Japan;
NuFlare Technology Inc. Yokohama Japan;
NuFlare Technology Inc. Yokohama Japan;
KANTO DENKA KOGYO CO. LTD. Marunouchi Chiyoda Tokyo Japan;
Pyrolytic Carbon; Recovery; Chlorine Trifluoride; Fluorine Out-Diffusion; Annealing;