RIKEN Center for Advanced Photonics 2-1 Hirosawa Wako Saitama 351-0198 Japan;
Innovative Photon Manipulation Research Team RIKEN Center for Advanced Photonics Wako Saitama 351-0198 Japan;
Innovative Photon Manipulation Research Team RIKEN Center for Advanced Photonics Wako Saitama 351-0198 JapanMetamaterials Laboratory RIKEN Cluster for Pioneering Research Wako Saitama 351-0198 Japan;
RIKEN Center for Advanced Photonics 2-1 Hirosawa Wako Saitama 351-0198 Japan;
hierarchical micro/nanostructures; persistent bubble; femtosecond laser; surface structuring; beam refraction; fan-shaped microstructure; LIPSS;