RIKEN Center for Advanced Photonics RIKEN 2-1 Hirosawa Wako Saitama 351-0198 Japan;
Center for EUV Lithography Laboratory of Advanced Science and Technology for Industry University of Hyogo Kamigori Hyogo 678-1205 Japan;
Center for EUV Lithography Laboratory of Advanced Science and Technology for Industry University of Hyogo Kamigori Hyogo 678-1205 Japan;
Center for EUV Lithography Laboratory of Advanced Science and Technology for Industry University of Hyogo Kamigori Hyogo 678-1205 Japan;
RIKEN Center for Advanced Photonics RIKEN 2-1 Hirosawa Wako Saitama 351-0198 Japan;
high-order harmonics; coherent EUV light; EUV lithography; coherent EUV scatterometry microscope; synchrotron radiation; EUV mask inspection;