Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

摘要

Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices,large-aperture astronomical telescopes,and high-resolution space cameras.In this study,the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter ofΦ1500 mm.The form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross grinding.Results show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral direction.It is a bilinear function of the feed-direction wheel setting error and the distance to the optical axis.Based on the error function above,a method to determine the wheel setting error is proposed.Subsequently,grinding tests are performed with the wheels aligned accurately.Using a newly proposed partial error compensation method with an appropriate compensation factor,a form error of 3.4μm peak-to-valley(PV)for aΦ400 mm elliptical K9 glass surface is achieved.