主要研究柔性阵列式声表面波微力传感器,进行两个金属或者非金属物体以及其间若干局部弹性介质接触面(厚度在1～5mm)间接触微压力(0.0 ～0.2N)的检测,根据基片结构所受应力变化使用有限元分析法进行受力分析,同时设计柔性阵列式传感器基片,确定边界条件,建立其线性回归数学模型并进行曲线拟合.该器件能够在特殊测量环境下满足力敏原件自由弯曲的特性,并且能够在恶劣环境下进行无源无线通信,在测量压力时具有抗干扰能力强、精度高且分辨率高的特性,可广泛应用于接触式测量、无损检测、机器人及生物力学等领域.%The study on flexible array surface acoustic wave(SAW) micro-force sensors was implemented,including the contact pressure (0.0 ～0.2N) detection of two metals or non-metal objects as well as some local elastic medium contact surface (thickness from 1 ～5mm).Considering the stress changes in the structure of the substrate,the finite element method was adopted for the force analysis and meanwhile,a flexible array sensor substrate was designed and the boundary conditions were determined as well as its linear regression mathematical model was established and the curve fitting was implemented.The device complies with the free bending of force-sensitive parts in special measurements and it can carry out wireless passive communication in the harsh environment;it has strong anti-interference,high precision and resolution ratio and it can be widely applied to the contact measurement,non-destructive testing,robotics,biomechanics and other fields.
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