Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
University of Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China;
Key Laboratory of Science and Technology on Silicon Devices Chinese Academy of Sciences Beijing 100029 China;
University of Chinese Academy of Sciences Beijing 100029 China;