机译:N2和O2退火对Al2O3 / Si3N4 / SiO2 / Si存储器栅堆叠完整性的比较
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
School of Electrical and Electronic Engineering, North China Electric Power University, Beijing 102206, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;