Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

著录项

• 来源
  《中国物理：英文版》 |2015年第6期|581-585|共5页
• 作者

  Sun Peng; Hu Ming; Zhang Feng; Ji Yi-Qin; Liu Hua-Song; Liu Dan-Dan; Leng Jian;

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• 作者单位

  School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

  School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

  Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics,HIWING Technology Academy of CASIC, Tianjin 300192, China;

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• 收录信息 中国科学引文数据库(CSCD);中国科技论文与引文数据库(CSTPCD);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词