空间晶体生长炉综合控制方法

摘要

空间晶体生长炉控制对象复杂,具有纯滞后、强耦合、非线性等不利于控制的特性.为实现炉温的精确控制,提出了一个空间晶体生长炉综合控制方法并通过软件来实现.将相关系数法和增广递推最小二乘法相结合,辨识系统模型,使用Hooke-Jeeves模式搜索法进行PID参数的自整定,采用PID加前馈控制的算法对系统进行仿真,使用同样的算法和控制参数对空间晶体生长炉进行实时控制,并在控制的过程中实时调整控制参数,以达到最佳的控制结果.实验结果表明,当三个温区的温度均达到700℃时,温度稳定度小于±0.3℃,满足系统设计要求.同时介绍了实现综合控制软件的基本原理、功能、特点及在实际中的应用.实际工程的应用结果表明,该软件可满足空间晶体生长炉对控制系统的要求.%Crystal growth furnace in space is a complex system which has the characteristics of pure-delay, strong-coupling and nonlinearity. To meet the high precision temperature control of the crystal growth, a new integrated control software for crystal growth furnace in space is presented.The software has the modules of system identification, parameter tuning, computer-aided simulation and real-time system control. The correlation coefficient and the least squares method are used to accomplish the identification of the process model, the parameters of the controller are tuned by Hooke-Jeeves mode searching method, PID and Feed-forward algorithm are used to control the multi-zone furnace together. To simulate the process of controlling, it can adjust the parameters of the controller. After attaining a result of meeting requirement, it uses the parameters of the controller getting in simulation to control the furnace in real time on line. Through the integrated control software, we achieve batter results, when the three zones temperatures rise to 700℃, the stabilities of the three zones are all less than ±0.3℃. The strong-coupling among these three zones are suppressed clearly. The basic principle, powerful functionality, attractive features are discussed in details. The application of this software shows its effectiveness.