通过离子交换技术对衬底表面改性,然后喷墨打印掩膜图形,在聚酰亚胺衬底两面分别制备了银叉指电极和加热电阻.通过调节电阻加热器两端的直流偏压,实现25 ℃~280 ℃的控温加热.集成的加热器具有双重功能:纳米ZnO敏感薄膜原位沉积和高温检测.结果表明,该传感器对丙酮气体的灵敏度随温度单调增加(<150 ℃).此外,加热器促进了ZnO敏感薄膜表面丙酮气体分子的解吸,缩短了传感器响应和恢复时间,并减小了初始电阻的漂移.此外,在丙酮检测中,加热器能有效地减少湿度干扰.%In combination of inkjet-printed carbon masking and surface modification of ion-exchange method(SMIE) techniques,silver interdigitated electrode for sensor and the resistors for heating were fabricated on different sides of the polyimide substrate subsequently. The controlled temperature,ranging from 25 ℃ to 280 ℃,can be realized by adjusting the DC bias voltage across the resistive heater.The integrated heater offered twofold functions:ZnO sensing film in situ deposition and elevated temperature detection.With the aid of heater,the ZnO sensing films composed of nanoparticles were first in situ deposited.The heater introduction can obviously improve the sensor performance.The results indicated that the sensitivity increased monotonically with temperature(<150℃). Since the acetone desorp-tion on sensor surface had been facilitated,the sensor had the shortened response and recovery time,and the initial resistance drift is also tolerable. In addition,the heater can effectively reduce the interference from humidity during the acetone detection.
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