LOADS INFLUENCE ANALYSIS ON NOVEL HIGH PRECISION FLEXURE PARALLEL POSITIONER

摘要

＜正＞A large workspace flexure parallel positioner system is developed, which can attain sub-micron scale accuracy over cubic centimeter motion range for utilizing novel wide-range flexure hinges instead of the conventional mechanism joints. Flexure hinges eliminate backlash and friction, but on the other hand their deformation caused by initial loads influences the positioning accuracy greatly, so discussions about loads’ influence analysis on this flexure parallel positioner is very necessary. The stiffness model of the whole mechanism is presented via stiffness assembly method based on the stiffness model of individual flexure hinge. And the analysis results are validated by the finite element analysis （FEA） simulation and experiment tests, which provide essential data to the practical application of this positioner system.