一种基于MZI的聚合物光波导加速度计

摘要

A polymer optical waveguide accelerometer based on Mach-Zehnder Interferometer(MZI)is proposed.The transmission function have been theoretically deduced.The relations between the structure parameters and the device sensitivity are simulated in details.The property of accelerometer based on polymer material and polymer substrate is fabricated and tested.A sensor chip is fabricated which the single mode rectangular waveguide is 4 μm×4 μm.We set up a test system of accelerometer which measure the acceleration using calibration method.The resolution of the accelerometer is 10-2 gn,and the dynamic range is±2 gn.%提出了一种基于马赫增德尔干涉仪(MZI)的聚合物光学波导加速度计.理论推导了MZI结构的传输函数,仿真分析了悬臂梁结构参数与器件灵敏度的关系,制备得到了4 μm×4 μm单模传输芯层波导的传感芯片.搭建了集成光学加速度测试系统,采用比较校准法对探测器输出电压信号进行标定,实现了传感芯片因施加加速度后输出光强变化的测试,完成了加速度测量.该加速度传感芯片分辨率为10-2 gn,动态范围为±2 gn.