Novel One-component Positive-tone Chemically Amplified I-Line Molecular Glass Photoresist Based on Tannic Acid

著录项

• 来源
  《高等学校化学研究（英文版）》 |2015年第4期|585-589|共5页
• 作者

  WEI Qi; WANG Liyuan;

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• 作者单位

  Beijing Key Laboratory of Energy Conversion and Storage Materials, College of Chemistry,Beijing Normal University, Beijing 100875, P.R.China;

  Beijing Key Laboratory of Energy Conversion and Storage Materials, College of Chemistry,Beijing Normal University, Beijing 100875, P.R.China;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
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