用于粒子加速器位置监测的线位置探测器静态特性的标定

摘要

本文介绍了一种线位置探测器(WPS)静态特性标定的方法.建立了一套由激光位移传感器、水平与垂直调节平台组成的静态特性标定系统.在垂直和水平两个方向对WPS的测量静态特性进行了研究.在WPS的测量范围内,以步长0.1 mm进行位移量输入,满量程观察了WPS的输出位移量.对输入输出数据进行了拟合,得到WPS灵敏度以及均方根误差.输入步长分别设为5、2和1 μm,考查输出量变化可得到仪器的分辨率.实验结果表明:垂直方向灵敏度KV不低于-1.005 02,均方根误差为0.002 4 mm,分辨率达2 μm.水平方向灵敏度KH不低于-1.001 55,均方根误差为0.002 1 mm,分辨率同样达2 μm.该WPS灵敏度、均方根误差和分辨率均达到了监测所需的精度.%A method for calibrating the static characteristic of wire position sensor (WPS) was described in this paper.The static characteristic calibration system consisting of laser displacement sensor and adjustment platform in horizontal and vertical directions was constructed,and static characteristic research of WPS could be done in two directions.In measurement range of WPS,continuous displacement of 0.1 mm was done to obtain the output data from WPS.The sensitivity and root mean square error of WPS were obtained through fitting and analyzing input and output data.Changing the displacement into 5,2 and 1 μm,the resolution could be obtained from the change of output.The results show that in vertical direction,sensitivity KV is not less than-1.005 02,root mean square error is 0.002 4 mm,and the resolution reaches 2 μm;in horizontal direction,sensitivity KH is not less than-1.001 55,root mean square error is 0.002 1 mm,and the resolution also reaches 2 μm.For WPS,sensitivity,root mean square error and resolution all reach the requirement of detection accuracy.