6-23 Design of Vacuum System for Magnetic Mass Spectrometer

摘要

Ions with different rigidity have different radius of deflection in the same magnetic field, based on this principle the magnetic mass spectrometer, which will be used to analyze the beam quality and the distribution, can separate mixed ion beams. In order to reduce the energy loss of beam in vacuum pipe, the vacuum pressure level must be less than 1x10?4 Pa.