纳米小球辅助飞秒激光近场超衍射加工的研究进展

摘要

在飞秒激光加工过程中,如何突破衍射极限一直都是一个重要问题.近年来,纳米小球辅助飞秒激光近场超衍射加工逐渐被认识并发展起来,这一加工方法可以在基底表面产生小于入射激光衍射极限尺度的纳米孔洞,并可以实现大面积加工.从金属纳米小球和介电纳米小球这两个方面入手,分别对它们辅助飞秒激光近场加工的研究进行介绍.%During the femtosecond laser processing, how to break through the diffraction limit has always been an important problem. In recent years, nanospheres auxiliary femtosecond laser near field processing with characteristic size beyond the diffraction limit is recognized and developed gradually. It can fabricate nanoholes on the substrate surface of which scale is smaller than the incident laser diffraction limit, and can realize large area processing. In this paper, we will focus on the metal nanospheres and dielectric nanospheres, and introduce the study of nanospheres assisted femtosecond laser near field processing.