State Key Laboratory of Precision Measuring Technology and Instruments;
Laboratory of MicroNano Manufacturing Technology(MNMT);
Tianjin University;
Tianjin;
300072;
People’s Republic of China;
Centre of MicroNano Manufacturing Technology(MNMT-Dublin);
School of Mechanical and Materials Engineering;
University College Dublin;
Belfield;
Dublin 4;
Ireland;
Key Laboratory of Computational Optical Imaging Technology;
Chinese Academy of Sciences;
Beijing;
100094;
People’s Republic of China;
Optics; Process monitoring; Form; Roughness; Residual stress; Sensor;