A NEW FABRICATION PROCESS FOR A FLEXIBLE SKIN WITH TEMPERATURE SENSOR ARRAY AND ITS APPLICATIONS

摘要

This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40 × 1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.SmV/℃ (prior to amplifiers) at a drive current of 1 mA. To demonstrate its applications, two examples have been demonstrated, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.