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Microstructural and Compositional Tunability in Sputter-Deposited Transition-Metal Carbide Thin Films Using Ultra-Low Reactive Gas Pressures and 2D Layers

机译：微观结构和组成的可调性在溅射沉积过渡金属碳化物薄膜使用超低反应气体压力和2D 层

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作者
?Tanaka, Koichi;
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作者单位

University of California Los Angeles;

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授予单位 University of California Los Angeles;
学科
学位 Ph.D.
年度 2020
页码 99 p.
总页数 99
原文格式 PDF
正文语种 eng
中图分类
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1. Influence of ultra-low ethylene partial pressure on microstructural and compositional evolution of sputter-deposited Zr-C thin films [J] . Zaid Hicham, Aleman Angel, Tanaka Koichi, Surface & Coatings Technology . 2020,第1期

机译：超低乙烯分压对溅射沉积Zr-C薄膜微观结构和组成演化的影响
2. Effects of ultra-low ethylene partial pressure on microstructure and composition of reactively sputter-deposited Ta-C thin films [J] . Tanaka Koichi, Aleman Angel, Liao Michael E., Thin Solid Films . 2019,第Octa31期

机译：超低乙烯分压对反应溅射Ta-C薄膜微结构和组成的影响
3. Cr_2S_3(Et_2DTC) complex and [Cr_2S_3-MoS_2(Et_2DTC)] bilayer thin films: single source stationed fabrication, compositional, optical, microstructural and electrochemical investigation [J] . Jaffri Shaan Bibi, Ahmad Khuram Shahzad, Ifthikhar Saba Environmental Technology . 2021,第1a4期

机译：CR_2S_3（ET_2DTC）复合体和[CR_2S_3-MOS_2（ET_2DTC）]双层薄膜：单源驻留的制造，组成，光学，微观结构和电化学研究
4. Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering [C] . Erdem Baskurt, Tolga Tavsanoglu, Onuralp Yucel International ceramics congress . 2011

机译：甲烷流量对活性直流磁控溅射沉积碳化硅薄膜微观结构和力学性能的影响
5. Magnetic and microstructural properties of sputter-deposited amorphous cobalt-samarium thin films. [D] . Kubota, Yukiko. 1998

机译：溅射沉积非晶非晶-thin薄膜的磁性和微观结构性质。
6. Multilayer thin films with compositional PbZr0.52Ti0.48O3/Bi1.5Zn1.0Nb1.5O7 layers for tunable applications [O] . Shihui Yu, Lingxia Li, Weifeng Zhang, -1

机译：具有可调谐应用的PbZr0.52Ti0.48O3 / Bi1.5Zn1.0Nb1.5O7组成层的多层薄膜
7. Reactively Magnetron Sputter-Deposited Ti (C,N) Nanocomposite Thin Films: Composition and Thermal Stability [O] . Osama A. Fouad, Hong-Ying Lin, S. Ismat Shah 2018

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Microstructural and Compositional Tunability in Sputter-Deposited Transition-Metal Carbide Thin Films Using Ultra-Low Reactive Gas Pressures and 2D Layers

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