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Synthesis and characterization of silicon nitride thin films and their application as hermetic coatings on optical fibers for protection against hydrogen penetration

机译：氮化硅薄膜的合成，表征及其在光纤上作为防氢渗透的气密涂层的应用

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作者
Lin, Chi-Hsien;
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作者单位

Rutgers The State University of New Jersey - New Brunswick;

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授予单位 Rutgers The State University of New Jersey - New Brunswick;
学科
学位 Ph.D.
年度 1995
页码 168 p.
总页数 168
原文格式 PDF
正文语种 eng
中图分类
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Synthesis and characterization of silicon nitride thin films and their application as hermetic coatings on optical fibers for protection against hydrogen penetration

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