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Photochemistry applied in optical lithography. Use of spectroscopic and imaging techniques for the characterization of chemical processes in thin polymer films

机译：光化学在光学光刻中的应用。使用光谱和成像技术表征聚合物薄膜中的化学过程

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作者
Ivan, Marius Gabriel;
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作者单位

University of Ottawa (Canada);

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授予单位 University of Ottawa (Canada);
学科
学位 Ph.D.
年度 2007
页码 250 p.
总页数 250
原文格式 PDF
正文语种 eng
中图分类
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5. Characterization of charge injection processes of thin films on indium tin oxide electrodes using a novel spectroelectrochemical technique: Potential-modulated attenuated total reflectance spectroscopy. [D] . Araci, Zeynep Ozkan. 2010

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6. Chemically Resolved Imaging of Biological Cells and Thin Films by Infrared Scanning Near-Field Optical Microscopy [O] . Antonio Cricenti, Renato Generosi, Marco Luce, 2003

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7. Optical-based spectroscopic methods for measuring chemical, optical, and physical properties of thin polymer waveguide films [O] . Bobbitt, Jonathan M. 2017

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8. Preparation and Characterization of Thin Films Based on Sol-Gel Technique and Development of Spectroscopic Probe for Film Formation and Characterization. [R] . Reisfeld, R. 1989

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Photochemistry applied in optical lithography. Use of spectroscopic and imaging techniques for the characterization of chemical processes in thin polymer films

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