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Low-temperature Fabrication Process for Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors.

机译：集成高纵横比金属氧化物纳米结构半导体气体传感器的低温制造工艺。

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作者
Clavijo, William P.;
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作者单位

Virginia Commonwealth University.;

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授予单位 Virginia Commonwealth University.;
学科 Electrical engineering.;Materials science.
学位 Ph.D.
年度 2017
页码 144 p.
总页数 144
原文格式 PDF
正文语种 eng
中图分类
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2. Dual-metal-gate-integration complementary metal oxide semiconductor process scheme using Ru positive-channel metal oxide semiconductor and TaC negative-channel metal oxide semiconductor gate electrodes [J] . Wen-Tung Chang, Tsung-Eong Hsieh, Chung-Ju Lee Journal of Vacuum Science & Technology . 2007,第4期

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3. A complementary-metal-oxide-semiconductor-field-effect-transistor-compatible atomic force microscopy tip fabrication process and integrated atomic force microscopy cantilevers fabricated with this process [J] . Mizuki Ono, Dirk Lange, Oliver Brand Ultramicroscopy . 2002,第1a4期

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4. Gas Sensing Devices Based on 1D Metal-Oxide Nanostructures: Fabrication, Testing and Device Integration [C] . A. Romano-Rodriguez, F. Hernandez-Ramirez, R. Jimenez-Diaz, Electrochemical Society(ECS) Meeting;International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing; 20080518-22;20080518-22; Phoenix,AZ(US);Phoenix,AZ(US) . 2008

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5. Low-Temperature Solution Processing of Amorphous Metal Oxide Semiconductors for High-Performance Thin-Film Transistors. [D] . Hennek, Jonathan W. 2013

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6. Electronic Structure of Low-Temperature Solution-Processed AmorphousMetal Oxide Semiconductors for Thin-Film Transistor Applications [O] . Josephine Socratous, Kulbinder K Banger, Yana Vaynzof, -1

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8. Integrated Devices of Semiconductor Metal-Oxides in Conjunction with Silicon for Solid-State Gas Sensors. Progress Report, January 1, 1980-May 30, 1981 [R] . Jordan, A. G., Advani, G. N., Berg, D. 1981

机译：用于固态气体传感器的半导体金属氧化物与硅结合的集成器件。进展报告，1980年1月1日至1981年5月30日

Low-temperature Fabrication Process for Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors.

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