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Low-temperature oxidizing plasma surface modification and composite polymer thin-film fabrication techniques for tailoring the composition and behavior of polymer surfaces.

机译:低温氧化等离子体表面改性和复合聚合物薄膜制造技术,用于定制聚合物表面的组成和行为。

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摘要

This dissertation examines methods for modifying the composition and behavior of polymer material surfaces. This is accomplished using (1) low-temperature low-density oxidizing plasmas to etch and implant new functionality on polymers, and (2) plasma enhanced chemical vapor deposition (PECVD) techniques to fabricate composite polymer materials. Emphases are placed on the structure of modified polymer surfaces, the evolution of polymer surfaces after treatment, and the species responsible for modifying polymers during plasma processing.;H2O vapor plasma modification of high-density polyethylene (HDPE), low-density polyethylene (LDPE), polypropylene (PP), polystyrene (PS), polycarbonate (PC), and 75A polyurethane (PU) was examined to further our understanding of polymer surface reorganization leading to hydrophobic recovery. Water contact angles (wCA) measurements showed that PP and PS were the most susceptible to hydrophobic recovery, while PC and HDPE were the most stable. X-ray photoelectron spectroscopy (XPS) revealed a significant quantity of polar functional groups on the surface of all treated polymer samples. Shifts in the C1s binding energies (BE) with sample age were measured on PP and PS, revealing that surface reorganization was responsible for hydrophobic recovery on these materials. Differential scanning calorimetry (DSC) was used to rule out the intrinsic thermal properties as the cause of reorganization and hydrophobic recovery on HDPE, LDPE, and PP. The different contributions that polymer cross-linking and chain scission mechanisms make to polymer aging effects are considered.;The H2O plasma treatment technique was extended to the modification of 0.2 microm and 3.0 microm track-etched polycarbonate (PC-TE) and track-etched polyethylene terephthalate (PET-TE) membranes with the goal of permanently increasing the hydrophilicity of the membrane surfaces. Contact angle measurements on freshly treated and aged samples confirmed the wettability of the membrane surfaces was significantly improved by plasma treatment. XPS and SEM analyses revealed increased oxygen incorporation onto the surface of the membranes, without any damage to the surface or pore structure. Contact angle measurements on a membrane treated in a stacked assembly suggest the plasma effectively modified the entire pore cross section. Plasma treatment also increased water flux through the membranes, with results from plasma modified membranes matching those from commercially available hydrophilic membranes (treated with wetting agent). Mechanisms for the observed modification are discussed in terms of OH and O radicals implanting oxygen functionality into the polymers.;Oxidizing plasma systems (O2, CO2, H2O vapor, and formic acid vapor) were used to modify track-etched polycarbonate membranes and explore the mechanisms and species responsible for etching polycarbonate during plasma processing. Etch rates were measured using scanning electron microscopy; modified polycarbonate surfaces were further characterized using x-ray photoelectron spectroscopy and water contact angles. Etch rates and surface characterization results were combined with optical emission spectroscopy data used to identify gas-phase species and their relative densities. Although the oxide functionalities implanted by each plasma system were similar, the H2O vapor and formic acid vapor plasmas yielded the lowest contact angles after treatment. The CO2, H2O vapor, and formic acid vapor plasma-modified surfaces were, however, found to be similarly stable one month after treatment. Overall, etch rate correlated directly to the relative gas-phase density of atomic oxygen and, to a lesser extent, hydroxyl radicals.;PECVD of acetic acid vapor (CH3COOH) was used to deposit films on PC-TE and silicon wafer substrates. The CH3COOH films were characterized using XPS, wCA, and SEM. This modification technique resulted in continuous deposition and self-limiting deposition of a-CxO yHz films on Si wafers and PC-TE, respectively. The self-limiting deposition on PC-TE revealed that resulting films have minimal impact on 3D PC structures. This technique would allow for more precise fabrication of patterned or nano-textured PC.;PECVD is used to synthesize hydrocarbon/fluorocarbon thin films with compositional gradients by continuously changing the ratio of gases in a C 3F8/H2 plasma. The films are characterized using variable angle spectroscopic ellipsometry (VASE), Fourier transform infrared spectroscopy (FTIR), XPS, wCA, and SEM. These methods revealed that shifting spectroscopic signals can be used to characterize organization in the deposited film. Using these methods, along with gas-phase diagnostics, film chemistry and the underlying deposition mechanisms are elucidated, leading to a model that accurately predicts film thickness.
机译:本文研究了改变聚合物材料表面成分和行为的方法。这是通过以下方法实现的:(1)低温低密度氧化等离子体,以在聚合物上蚀刻和注入新功能;(2)等离子体增强化学气相沉积(PECVD)技术,以制造复合聚合物材料。重点放在改性聚合物表面的结构,处理后聚合物表面的演变以及等离子处理过程中负责改性聚合物的物质上;高密度聚乙烯(HDPE),低密度聚乙烯(LDPE)的H2O蒸气等离子体改性),聚丙烯(PP),聚苯乙烯(PS),聚碳酸酯(PC)和75A聚氨酯(PU)进行了研究,以进一步了解导致疏水性回收的聚合物表面重组。水接触角(wCA)测量表明,PP和PS对疏水性恢复最敏感,而PC和HDPE最稳定。 X射线光电子能谱(XPS)显示,在所有处理过的聚合物样品的表面上都有大量的极性官能团。在PP和PS上测量了C1s结合能(BE)随样品年龄的变化,表明表面重组是导致这些材料上疏水性恢复的原因。使用差示扫描量热法(DSC)排除了固有的热学性质,这是HDPE,LDPE和PP发生重组和疏水恢复的原因。考虑了聚合物交联和断链机理对聚合物老化作用的不同贡献。H2O等离子体处理技术扩展到对0.2微米和3.0微米径迹蚀刻聚碳酸酯(PC-TE)的改性和径迹蚀刻聚对苯二甲酸乙二酯(PET-TE)膜,其目的是永久增加膜表面的亲水性。对新鲜处理和老化样品的接触角测量结果证实,通过等离子体处理,膜表面的润湿性得到了显着改善。 XPS和SEM分析表明,氧气在膜表面的结合增加,而对表面或孔结构没有任何损害。在堆叠组件中处理过的膜的接触角测量表明,等离子体有效地改变了整个孔的横截面。血浆处理还增加了通过膜的水通量,其结果来自血浆改性膜与可商购亲水膜(用润湿剂处理)匹配的结果。讨论了观察到的改性机理,包括将氧官能团注入聚合物中的OH和O自由基。;氧化等离子体系统(O2,CO2,H2O蒸气和甲酸蒸气)被用于改性履带蚀刻的聚碳酸酯膜并探索等离子体处理过程中负责蚀刻聚碳酸酯的机理和种类。蚀刻率使用扫描电子显微镜测量。改性的聚碳酸酯表面使用X射线光电子能谱和水接触角进一步表征。蚀刻速率和表面表征结果与用于识别气相物质及其相对密度的光发射光谱数据相结合。尽管每个等离子体系统注入的氧化物功能相似,但是在处理后,H2O蒸气和甲酸蒸气等离子体产生的接触角最低。然而,发现在处理一个月后,CO2,H2O蒸气和甲酸蒸气的等离子体改性表面同样稳定。总体而言,蚀刻速率与原子氧的相对气相密度直接相关,而在较小程度上与羟基自由基直接相关。乙酸蒸气的PECVD(CH3COOH)用于在PC-TE和硅晶片基板上沉积膜。 CH3COOH膜使用XPS,wCA和SEM进行表征。这种改性技术分别在硅片和PC-TE上连续沉积和自限沉积a-CxO yHz膜。在PC-TE上的自限沉积表明,所得薄膜对3D PC结构的影响最小。该技术将允许更精确地制造图案化或具有纳米结构的PC。PECVD用于通过连续改变C 3F8 / H2等离子体中的气体比例来合成具有成分梯度的碳氢化合物/碳氟化合物薄膜。使用可变角度光谱椭圆仪(VASE),傅立叶变换红外光谱(FTIR),XPS,wCA和SEM对薄膜进行表征。这些方法表明,移动光谱信号可用于表征沉积膜中的组织。使用这些方法以及气相诊断技术,可以阐明薄膜的化学性质和潜在的沉积机理,从而形成可以准确预测薄膜厚度的模型。

著录项

  • 作者

    Tompkins, Brendan D.;

  • 作者单位

    Colorado State University.;

  • 授予单位 Colorado State University.;
  • 学科 Chemistry Analytical.;Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2014
  • 页码 282 p.
  • 总页数 282
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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