The amorphous alloys Ni{dollar}sb{lcub}75.1{rcub}{dollar}Cr{dollar}sb{lcub}14{rcub}{dollar}P{dollar}sb{lcub}10.1{rcub}{dollar}C{dollar}sb{lcub}0.08{rcub}{dollar}, Ni{dollar}sb{lcub}63.5{rcub}{dollar}Zr{dollar}sb{lcub}36.5{rcub}{dollar}, and Ni{dollar}sb{lcub}87.7{rcub}{dollar}P{dollar}sb{lcub}12.3{rcub}{dollar} have been implanted with 150 keV helium-3 ions with doses 1 x 10{dollar}sp{lcub}16{rcub}{dollar} He{dollar}sp3{dollar}/cm{dollar}sp2{dollar} and 5 x 10{dollar}sp{lcub}16{rcub}{dollar} He{dollar}sp3{dollar}/cm{dollar}sp2{dollar}. After implantations, the samples were isochronally annealed at several consecutive stages up to their crystallization temperatures. After each annealing stage, the surface features were examined by scanning electron microscope, subsurface microstructural changes were investigated by electron diffraction using a scanning transmission electron microscope, and helium-3 depth profiles were measured by a thermal neutron induced nuclear reaction technique called neutron depth profiling (NDP). This last technique determines a helium-3 concentration profile from the measured energy distribution of emitted protons produced by the reaction {dollar}sp3{dollar}He(n,p){dollar}sp3{dollar}H when beam of thermal neutrons passes through a sample. By comparing the helium-3 depth profiles after each annealing stage, helium-3 migration or loss can be determined as a function of annealing temperature.; The conclusions drawn from the experimental results can be divided into two major components. First, it was confirmed that for amorphous metals (a) the helium-3 release is concentration dependent (b) the migration and the release of helium-3 is controlled by detrapping mechanism, (c) the crystallization temperatures obtained in this study are in agreement with the reported values. Second, the new results determined by this experiment may be summarized as follows. The penetration depth or the projected depth of helium-3 ions with an initial energy of 150 keV is measured here for the first time after obtaining the depth profiles by using the NDP technique. The most probable range values are: 320 nm for Ni{dollar}sb{lcub}75.1{rcub}{dollar}Cr{dollar}sb{lcub}14{rcub}{dollar}P{dollar}sb{lcub}10.1{rcub}{dollar}C{dollar}sb{lcub}0.08{rcub}{dollar}, 378 nm for Ni{dollar}sb{lcub}63.5{rcub}{dollar}Zr{dollar}sb{lcub}36.5{rcub}{dollar} and 375 nm for Ni{dollar}sb{lcub}87.7{rcub}{dollar}P{dollar}sb{lcub}12.3{rcub}{dollar}. No blisters, bubbles or pitting were observed on the samples when they were annealed up to their crystallization temperature. Some of the helium-3 trapped in amorphous metals seems not to be as strongly bound as in single crystal nickel. More helium-3 release was observed for the metal-metal amorphous metal samples than the metal-metalloid amorphous metal. For metal-metal amorphous alloys the helium-3 release behavior can be correlated with the partial or full crystallization. For metal-metalloid amorphous alloys this correlation may depend on the chemical composition.
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