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Novel Dielectric Materials for High Performance and Low-Voltage Thin-Film Transistors: Organic-Inorganic Hybrid Blends and Multilayers.

机译:用于高性能和低压薄膜晶体管的新型介电材料:有机-无机混合混合物和多层。

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摘要

Organic thin-film transistors (OTFTs) have been the focus of intense research over the past few decades as alternatives to silicone-based conventional transistors. In these devices, dielectric characteristics play a critical role in influencing OTFT operation and performance. My thesis research focuses on two novel classes of dielectric materials based on organic-inorganic hybrid blends and hybrid multilayers. At first, the design, synthesis, processing, and dielectric properties of novel crosslinked inorganic/organic hybrid blend (CHB) dielectric films for low-voltage organic thin film transistor (OTFT) operation are introduced. CHB thin films are readily fabricated by spin-coating a zirconium chloride precursor + an alpha,o-disilylalkane crosslinker solution in ambient, followed by curing at low temperatures (∼150°C). The very smooth CHB dielectrics exhibit excellent insulating properties (leakage current densities ∼ 10-7 A/cm2), tunable capacitance (95 -- 365 nF/cm2), and high dielectric constants (5.0 -- 10.2). OTFTs fabricated with pentacene and PDIIF-CN2 as the organic semiconductor function well at low voltages ( -4.0 V). The morphologies and microstructures of representative pentacene films grown on CHB dielectrics prepared with incrementally varied compositions and processing conditions are investigated and shown to correlate closely with OTFT response. Furthermore, pentacene OTFTs fabricated on plastic substrates with these new hybrid dielectrics are shown to operate at low voltages ( -4.0 V), and to offer high on-off current ratios (>105) as well as substantial hole mobilities (0.2-1.5 cm2V-1s-1).;Secondly, the rational synthesis, processing, and dielectric properties of novel layer-by-layer organic/inorganic hybrid multilayer dielectric films are introduced. These new zirconia-based self-assembled nanodielectric (Zr-SAND) films (5 ∼12 nm thick) are readily fabricated via solution processes under ambient atmosphere using polarizable pi-electron phosphonic acid building blocks and ultra-thin ZrO2 layers. Attractive Zr-SAND properties include amenability to accurate control of film thickness, large-area uniformity, well-defined nanostructure, exceptionally large electrical capacitance (up to 750 nF˙cm-2), excellent insulating properties (leakage current densities as low as 10-7 A˙cm-2), and excellent thermal stability. Thin-film transistors (TFTs) fabricated with pentacene and PDIF-CN2 as representative organic semiconductors and zinc-tin-oxide (Zn-Sn-O) as a representative inorganic semiconductor, function well at low voltages ( +/- 4.0 V). Furthermore, the TFT performance parameters of representative organic semiconductors deposited on Zr-SAND films, functionalized on the surface with various alkylphosphonic acid self-assembled monolayers, are investigated and shown to correlate closely with the alkylphosphonic acid chain dimensions.
机译:在过去的几十年中,有机薄膜晶体管(OTFT)作为基于有机硅的常规晶体管的替代品已成为研究的重点。在这些设备中,介电特性在影响OTFT的运行和性能方面起着至关重要的作用。我的论文研究集中在基于有机-无机混合共混物和混合多层的两类新型介电材料上。首先,介绍了用于低压有机薄膜晶体管(OTFT)操作的新型交联无机/有机杂化共混物(CHB)电介质膜的设计,合成,工艺和介电性能。通过在环境中旋涂氯化锆前体+α,o-二甲硅烷基烷烃交联剂溶液,然后在低温(约150°C)下固化,可以轻松制造CHB薄膜。非常光滑的CHB电介质具有出色的绝缘性能(漏电流密度约为10-7 A / cm2),可调电容(95-365 nF / cm2)和高介电常数(5.0-10.2)。用并五苯和PDIIF-CN2作为有机半导体制造的OTFT在低压(<-4.0 V)下表现良好。研究了在具有逐渐变化的组成和加工条件的CHB电介质上生长的代表性并五苯薄膜的形貌和微观结构,并显示与OTFT响应密切相关。此外,使用这些新型混合电介质在塑料基板上制造的并五苯OTFT显示在低电压(<-4.0 V)下工作,并提供高开关电流比(> 105)以及相当大的空穴迁移率(0.2-1.5)其次,介绍了新颖的逐层有机/无机杂化多层介电薄膜的合理合成,加工和介电性能。这些新型的基于氧化锆的自组装纳米电介质(Zr-SAND)膜(5至12 nm厚)很容易通过在环境气氛下使用可极化的π电子膦酸构造模块和超薄的ZrO2层通过溶液法制备。引人注目的Zr-SAND性能包括可精确控制膜厚度,大面积均匀性,定义明确的纳米结构,超大电容(高达750 nF·cm-2),出色的绝缘性能(漏电流密度低至10) -7 A·cm-2),并且热稳定性优异。以并五苯和PDIF-CN2为代表的有机半导体以及以氧化锌锡(Zn-Sn-O)为代表的无机半导体制成的薄膜晶体管(TFT)在低压(<+/- 4.0 V)下表现良好。此外,研究了沉积在Zr-SAND薄膜上的代表性有机半导体的TFT性能参数,这些薄膜在表面上被各种烷基膦酸自组装单层功能化,并显示出与烷基膦酸链尺寸密切相关。

著录项

  • 作者

    Ha, Young-Geun.;

  • 作者单位

    Northwestern University.;

  • 授予单位 Northwestern University.;
  • 学科 Chemistry Inorganic.;Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2011
  • 页码 154 p.
  • 总页数 154
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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