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The impact of multilayer periodicity on texture, morphology, chemical stability and machining performance of titanium aluminum nitride/chromium nitride thin films.

机译:多层周期性对氮化铝钛/氮化铬薄膜的织构,形态,化学稳定性和加工性能的影响。

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摘要

Multilayer thin films of TiAlN/CrN were deposited at varying bilayer periods (λ = 2, 4, 8 and 16 nm), along with a co-deposited (TiAlCr)N film and constituent TiAlN and CrN films, on both [111] silicon substrates and WC-4wt% Co inserts with an ISO SPGN 120308 geometry. The effects of periodicity on grain structure, texture, surface morphology, and roughness were examined, with characterization performed using electron microscopy, atomic force microscopy and x-ray diffraction analysis. An in-air constant temperature oxidation study was also performed at 650 thru 1050°C with stacked XRD line profiles and SEM used to identify the onset and extent of oxidation, respectively. Finally, dry high speed flank wear tool life experiments were completed against A2 tool steel, with the impact of the multilayer period reported in ISO standard wear vs. cutting time format. Machining results were connected back to the previously identified changes in structure.;All films exhibited a rocksalt B1-type structure with a columnar morphology and lateral coarsening during film growth; which was more pronounced in the multilayer films with smaller bilayer periods. The surface morphology was found to be dependent on period; exhibiting sharp pyramidal surface features at λ = 2 nm and an increase in secondary faceting with increasing periodicity. Nearly rounded column tops result at λ = 16 nm. Surface roughness measurements showed an increasing roughness with decreasing bilayer period and pole figures revealed a small [111] texture component perpendicular to the sample surface in the 2 and 4 nm period films, with the distribution of [111] poles becoming nearly random for the films with larger periodicities (8 and 16 nm). Preferential [200] poles begin approximately 15° tilted away from the substrate normal while further increase in period results in a decrease in the off axis angle. The effect of multilayer period on the surface morphology is explained using an energetic argument whereby the higher interfacial energy density in the smaller period multilayers promotes a higher degree of faceting at the film surface.;Oxidation results are comparable for all multilayer films, where oxidation onset was delayed approximately 100°C over the TiAIN film. The co-deposited (TiAlCr)N film performed comparably to the multilayer films with a similar oxidized morphology. The TiAlN exhibited large oxide "rosettes" and through thickness cracking and oxidation in the film.;Machining results showed that a multilayer of greater than 2 nm is required for an effective coating, with the 4 nm film outperforming all multilayer and monolithic films due to increased oxidation resistance, hardness and a reduction in coating cracking and spalling. All films exhibited the three documented stages of wear: running in wear, steady state wear and dynamic wear and it was shown that the amount of carbide particles in the workpiece significantly impacts wear rate and tool life.
机译:TiAlN / CrN多层薄膜以变化的双层周期(λ= 2、4、8和16 nm)以及共沉积的(TiAlCr)N膜和组成的TiAlN和CrN膜沉积在两种[111]硅上基材和具有ISO SPGN 120308几何形状的WC-4wt%Co刀片。通过使用电子显微镜,原子力显微镜和X射线衍射分析进行表征,研究了周期性对晶粒结构,织构,表面形态和粗糙度的影响。还在650至1050°C下进行了室内恒温氧化研究,使用了堆叠的XRD线轮廓和SEM分别确定了氧化的开始和程度。最后,针对A2工具钢完成了干式高速后刀面磨损工具寿命试验,多层周期的影响以ISO标准磨损与切削时间格式报告。加工结果与先前确定的结构变化有关。所有膜均表现出岩石盐B1型结构,并在生长过程中呈柱状形态和横向变粗;这在双层周期较小的多层膜中更为明显。发现表面形态取决于周期。在λ= 2 nm处呈现出尖锐的锥体表面特征,并且随着周期性的增加,次级刻面也增加。在λ= 16 nm处产生近乎圆形的柱顶。表面粗糙度测量结果表明,随着双层周期的减小,粗糙度增加,并且极图显示在2和4 nm周期膜中垂直于样品表面的[111]纹理分量较小,[111]极的分布对于膜而言几乎是随机的具有较大的周期性(8和16 nm)。优先[200]磁极开始偏离基板法线大约15°倾斜,同时周期的进一步增加导致偏轴角减小。多层周期对表面形貌的影响用一种有力的论据来解释,即较小周期多层中较高的界面能密度促进了膜表面上较高的刻面度。在所有氧化开始的多层膜中,氧化结果是可比的在TiAIN膜上延迟约100℃。共沉积(TiAlCr)N膜的性能与具有相似氧化形态的多层膜相当。 TiAlN表现出大的氧化物“锈头”,并且在膜中贯穿厚度开裂和氧化。机加工结果表明,有效的涂层需要大于2 nm的多层,其中4 nm的膜性能优于所有多层和整体膜。提高了抗氧化性,硬度并减少了涂层开裂和剥落。所有薄膜均显示出三个已记录的磨损阶段:磨损,稳态磨损和动态磨损,并且表明工件中碳化物颗粒的数量会显着影响磨损率和刀具寿命。

著录项

  • 作者

    Delisle, Dale Andrew.;

  • 作者单位

    University of New Hampshire.;

  • 授予单位 University of New Hampshire.;
  • 学科 Engineering Industrial.;Nanotechnology.;Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2012
  • 页码 141 p.
  • 总页数 141
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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