Atomic force microscope based two-dimensional micro/nanoparticle manipulation and assembly.

摘要

There has been great interest in exploring methods for assembly and manipulation at the micro/nanoscale to build miniaturized systems, devices, structures, and machines. This thesis aims at two-dimensional micro/nanomanipulation and assembly of micro/nanoparticles using Atomic Force Microscope (AFM) probes. The nanoprobe is used to push the spherical micro/nanoparticle, which results in different dynamic behaviors such as rolling, sliding, stick-slip, and in-plane rotation. Continuum based modeling and simulation of the manipulation task is presented and micro/nanoscale contact mechanics for adhesion and friction forces are considered. For tribological characterization of materials, a 25 mu m diameter polystyrene particle is pushed laterally on a glass substrate and the friction forces are recorded. After calibration, vision based semi-automatic assembly of the microparticles is developed and microscale patterns are produced. The microrobotic assembly technique is applied to make templates for novel force-controlled microcontact printing purposes.; The primary contributions of this thesis are to realize the dominant behavioral mode and dynamics of the particle, derive tribological parameters by active pushing, and develop force-controlled printing for patterning of nanomaterials. The modeling, simulation, and experiments have enhanced understanding of the interaction forces at the micro/nanoscale during micro/nanoassembly and particle manipulation.