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Coupled-field modeling of interconnect failure by electromigration in microelectronics systems.

机译:微电子系统中通过电迁移进行互连故障的耦合场建模。

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摘要

As the electronics industry continues to push for high performance and miniaturization of electronic devices, the demand for high current density causes electromigration failure in integrated circuits (IC) interconnects and in solder bumps of an IC package. This work reports new findings on the uncertainty that exists in the practice of atomic flux divergence (AFD) method used for studying and quantifying the electromigration (EM) failure of solder joints in wafer level packages. As the name indicates, AFD method calculates the migration of metal atoms. In EM phenomena, the driving forces for mass transportation are current density, temperature gradient, mechanical stress gradient, and atomic density gradient (ADG). But in conventional AFD method (widely used) the effect of ADG is neglected. First, the electromigration phenomenon is studied (using conventional AFD method) in a Lead-free solder joint of an encapsulated copper post wafer level package by finite element modeling. Submodeling method is applied to it. Coupled electrical-, thermal-, and mechanical finite element modeling is performed. Results show the negative values of the divergences of atomic fluxes due to electron current and thermal stresses are obtained under certain loading conditions on cathode side. Such results are contradictory to the published test data. Submodeling presents accurate results if cut boundary is appropriately chosen.;Secondly, current density singularity in electromigration of solder bumps is investigated. A theoretical analysis is performed on a homogenous wedge with arbitrary apex angle, 2(π –&thetas;0), when the current flow passes through. A potential difference is applied at a distance far away from the tip of the wedge. It is found that current density singularity exists at the tip of the wedges when the angles &thetas;0 < 90°. The acute angles represent the corner configuration of the actual solder bump and the interconnect. The current crowding in bumps is a result of singularity exhibited at such corners. Finite element results confirm that the maximum current density has strong dependence on mesh size. To eliminate the singularity effect, a volume-averaged current density approach is suggested.;Finally, another electromigration failure model based on the accumulation of vacancies is studied. This new method is called vacancy concentration method (VCM). In this method vacancy diffusion due to electromigration and migration due to AGD only are considered. A 1-D VCM equation is studied over a conductor stripe simulating a grain boundary. Three reasonable boundary conditions for the electromigration diffusion equation were investigated analytically and numerically. Using a dimensionless parameter, a time to failure for conductors was suggested. It was also seen that if failure was to occur, failure times would follow a j-2 relationship which is in accordance with Black's empirical formula.
机译:随着电子工业继续追求电子设备的高性能和小型化,对高电流密度的需求导致集成电路(IC)互连和IC封装的焊料凸点中的电迁移失败。这项工作报告了有关原子通量发散(AFD)方法实践中存在的不确定性的新发现,该方法用于研究和量化晶圆级封装中焊点的电迁移(EM)故障。顾名思义,AFD方法计算金属原子的迁移。在EM现象中,大众运输的驱动力是电流密度,温度梯度,机械应力梯度和原子密度梯度(ADG)。但是在传统的AFD方法(广泛使用)中,ADG的作用被忽略了。首先,通过有限元建模研究(使用常规AFD方法)在封装的铜柱晶圆级封装的无铅焊点中的电迁移现象。子建模方法被应用于它。进行了电,热和机械耦合的有限元建模。结果表明,在一定的负载条件下,在阴极侧,由于电子电流引起的原子通量发散为负值,并且获得了热应力。这样的结果与公布的测试数据相矛盾。如果适当选择切割边界,则子模型可提供准确的结果。其次,研究了焊料凸块电迁移中的电流密度奇异性。当电流通过时,对具有任意顶角2(π-θ 0 )的同质楔形进行理论分析。在远离楔形尖端的距离处施加电势差。发现当θ 0 <90°时,电流密度奇异性存在于楔形的尖端。锐角代表实际焊料凸块和互连的拐角配置。当前在颠簸中的拥挤是在这样的拐角处表现出的奇异性的结果。有限元结果证实,最大电流密度与网眼尺寸密切相关。为消除奇异效应,提出了体积平均电流密度方法。最后,研究了另一种基于空位积累的电迁移失效模型。这种新方法称为空缺集中法(VCM)。在该方法中,仅考虑了由于电迁移引起的空位扩散和仅由于AGD引起的迁移。在模拟晶粒边界的导体条上研究了一维VCM方程。分析和数值研究了电迁移扩散方程的三个合理边界条件。使用无量纲参数,建议导体失效的时间。还可以看到,如果发生故障,故障时间将遵循 j -2 关系,该关系符合Black的经验公式。

著录项

  • 作者

    Dandu, Pridhvi.;

  • 作者单位

    Lamar University - Beaumont.;

  • 授予单位 Lamar University - Beaumont.;
  • 学科 Engineering Mechanical.
  • 学位 D.E.
  • 年度 2012
  • 页码 117 p.
  • 总页数 117
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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